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Product category: IC and Hybrid Processing Equipment
News Release from: Oxford Instruments Plasma Technology
Edited by the Electronicstalk Editorial Team on 20 December 2007

Process tool systems ordered for
research complex

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Nine systems will provide University of Southampton with leading-edge capabilities in the research and development of novel nanoelectronic, MEMS and photonic devices.

Oxford Instruments has won an order for nine process tool systems, worth a total in excess of GBP 2.5 million, to equip a new cleanroom facility at the University of Southampton, UK The new Mountbatten research complex will serve the world-leading research of the School of Electronics and Computer Science and the Optoelectronics Research Centre